On the determination of the sp to sp ratio in diamond-like carbon thin films
نویسنده
چکیده
The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the e2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of spand sp-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed e-, spectra in the low energy range (< 4 eV). The atomic fraction of sp-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
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